Surface chemical analysis. X-ray photoelectron and Auger electron spectrometers. Linearity of intensity scale

Surface chemical analysis. X-ray photoelectron and Auger electron spectrometers. Linearity of intensity scale

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1   Scope

This International Standard specifies two methods for determining the maximum count rate for an acceptable limit of divergence from linearity of the intensity scale of Auger and X-ray photoelectron spectrometers. It also includes methods to correct for intensity non-linearities so that a higher maximum count rate can be employed for those spectrometers for which the relevant correction equations have been shown to be valid.