Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

£320.00
£320.00
£160.00
Sold out

1   Scope

This Technical Report describes:
  1. a) Functions and their relevance to lateral resolution:
    1. 1) Point spread function (PSF) — see 4.1.1
    2. 2) Line spread function (LSF) — see 4.1.2
    3. 3) Edge spread function (ESF) — see 4.1.3
    4. 4) Modulation transfer function (MTF) — see 4.1.4
    5. 5) Contrast transfer function (CTF) — see 4.1.5.
  2. b) Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:
    1. 1) Imaging of a narrow stripe — see 4.2
    2. 2) Imaging of a sharp edge — see 4.3
    3. 3) Imaging of square-wave gratings — see 4.4.
  3. c) Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy — see Clauses 5 and 6.