Surface chemical analysis. Auger electron spectroscopy. Reporting of methods used for charge control and charge correction

BS ISO 29081:2010 Surface chemical analysis. Auger electron spectroscopy. Reporting of methods used for charge control and charge correction

BS ISO 29081 specifies the minimum amount of information required for describing the methods of charge control in measurements of Auger electron transitions from insulating specimens by electronstimulated

Auger electron spectroscopy and to be reported with the analytical results. Information is provided in Annex A on methods that have been found useful for charge control prior to or during AES analysis. This annex also contains a table summarizing the methods or approaches, ordered by simplicity of approach.

Some methods will be applicable to most instruments, others require special hardware, others might involve remounting the specimen or changing it. A similar International Standard has been published for X-ray

photoelectron spectroscopy (ISO 19318).

Contents of BS ISO 29081:

Foreword

Introduction

1 Scope

2 Normative references

3 Terms and definitions

4 Symbols and abbreviated terms

5 Apparatus

5.1 Charge-control technique

5.2 Special apparatus

5.3 Specimen mounting and preparation

5.4 Instrument calibration

6 Reporting of information related to charge control

6.1 Methods of charge control

6.2 Reasons for needing charge control and choice of method

6.3 Specimen information

6.3.1 Specimen form

6.3.2 Specimen dimensions

6.3.3 Specimen-mounting methods

6.3.4 Specimen treatment prior to or during analysis

6.4 Values of experimental parameters

6.5 Information on the effectiveness of methods of charge control

7 Reporting of method(s) used for charge correction and the value of that correction

7.1 Methods of charge correction

7.2 Approach

7.3 Value of correction energy