Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators

Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators

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What is this standard about?

This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.