Optics and photonics. Interferometric measurement of optical elements and optical systems - Calibration and validation of interferometric test equipment and measurements

Optics and photonics. Interferometric measurement of optical elements and optical systems - Calibration and validation of interferometric test equipment and measurements

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1   Scope

This part of ISO 14999 discusses sources of error and the separation of errors into symmetric and non-symmetric parts. It also describes the reliance of measurements on the quality of a physical reference surface and the development of test procedures capable of achieving absolute calibration.