This International Standard defines terms used in the practice of AEM. It covers both general and specific concepts classified according to their hierarchy in a systematic order.

This International Standard is applicable to all standardization documents relevant to the practice of AEM. In addition, some parts of this International Standard are applicable to those documents relevant to the practice of related fields (e.g. TEM, STEM, SEM, EPMA, EDX) for the definition of those terms common to them.